Gas-Surface Dynamics and Profile Evolution during Etching of Silicon
Phys Rev Lett
.
1996 Sep 30;77(14):3049-3052.
doi: 10.1103/PhysRevLett.77.3049.
Authors
GS Hwang
,
CM Anderson
,
J Gordon
,
TA Moore
,
TK Minton
,
KP Giapis
PMID:
10062118
DOI:
10.1103/PhysRevLett.77.3049
No abstract available