First tests of a dipole lens for a scanning electron microscope

A V Crewe; O H Kapp

doi:10.1046/j.1365-2818.2003.01096.x

First tests of a dipole lens for a scanning electron microscope

J Microsc. 2003 Jan;209(Pt 1):47-55. doi: 10.1046/j.1365-2818.2003.01096.x.

Authors

A V Crewe¹, O H Kapp

Affiliation

¹ The Enrico Fermi Institute, The University of Chicago, 5640 South Ellis Avenue, IL 60637, USA.

PMID: 12535184
DOI: 10.1046/j.1365-2818.2003.01096.x

Abstract

We have previously shown that a dipole lens has superior properties that are particularly suited for use in a low voltage scanning electron microscope (SEM) (Tsai & Crewe, 1996). The aberrations are lower than for any other type of lens and lead to a prediction of high resolution. We describe the construction details of a microscope based on this principle and present some early results.