Characterization and fabrication of fully metal-coated scanning near-field optical microscopy SiO2 tips

J Microsc. 2003 Mar;209(Pt 3):182-7. doi: 10.1046/j.1365-2818.2003.01107.x.

Abstract

The fabrication of silicon cantilever-based scanning near-field optical microscope probes with fully aluminium-coated quartz tips was optimized to increase production yield. Different cantilever designs for dynamic- and contact-mode force feedback were implemented. Light transmission through the tips was investigated experimentally in terms of the metal coating and the tip cone-angle. We found that transmittance varies with the skin depth of the metal coating and is inverse to the cone angle, meaning that slender tips showed higher transmission. Near-field optical images of individual fluorescing molecules showed a resolution < 100 nm. Scanning electron microscopy images of tips before and after scanning near-field optical microscope imaging, and transmission electron microscopy analysis of tips before and after illumination, together with measurements performed with a miniaturized thermocouple showed no evidence of mechanical defect or orifice formation by thermal effects.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Aluminum / chemistry
  • Chromium / chemistry
  • Equipment Design
  • Gold / chemistry
  • Hot Temperature
  • Iridium / chemistry
  • Latex / analysis
  • Metals / chemistry*
  • Microscopy, Scanning Probe / instrumentation*
  • Silicon Dioxide / chemistry*

Substances

  • Latex
  • Metals
  • Chromium
  • Iridium
  • Gold
  • Silicon Dioxide
  • Aluminum