Abstract
A workstation that permits real-time measurement of ablation depth while micromachining with femtosecond laser pulses is demonstrated. This method incorporates the unamplified pulse train that is available in a chirped-pulse amplification system as the probe in an arrangement that uses spectral interferometry to measure the ablation depth while cutting with the amplified pulse in thin metal films.
Publication types
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Evaluation Study
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Research Support, Non-U.S. Gov't
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Research Support, U.S. Gov't, P.H.S.
MeSH terms
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Equipment Design / instrumentation*
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Equipment Design / methods
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Equipment Failure Analysis
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Industry / instrumentation*
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Industry / methods
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Interferometry / instrumentation*
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Interferometry / methods
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Lasers*
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Manufactured Materials*
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Spectrum Analysis / instrumentation*
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Spectrum Analysis / methods