Development of a femtosecond micromachining workstation by use of spectral interferometry

Opt Lett. 2005 Feb 15;30(4):373-5. doi: 10.1364/ol.30.000373.

Abstract

A workstation that permits real-time measurement of ablation depth while micromachining with femtosecond laser pulses is demonstrated. This method incorporates the unamplified pulse train that is available in a chirped-pulse amplification system as the probe in an arrangement that uses spectral interferometry to measure the ablation depth while cutting with the amplified pulse in thin metal films.

Publication types

  • Evaluation Study
  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, P.H.S.

MeSH terms

  • Equipment Design / instrumentation*
  • Equipment Design / methods
  • Equipment Failure Analysis
  • Industry / instrumentation*
  • Industry / methods
  • Interferometry / instrumentation*
  • Interferometry / methods
  • Lasers*
  • Manufactured Materials*
  • Spectrum Analysis / instrumentation*
  • Spectrum Analysis / methods