Lensless electron reflection microscopy using a coaxial point-source structure

Ultramicroscopy. 2006 Apr;106(6):480-5. doi: 10.1016/j.ultramic.2006.01.001. Epub 2006 Feb 8.

Abstract

A lensless image of the surface of a crystal is obtained by the reflection on this surface of a low-energy electron beam originated from a point source integrated in a coaxial structure. The point source is a sharp field emission tip and a free propagation of reflected electrons results from the shielding of the tip voltage provided by the coaxial structure. Images are obtained for an incidence angle between 3 and 45 degrees and for nA incident currents with a kinetic energy down to 40 V. On silicon surfaces a magnification up to a few thousands and a spatial resolution of 100 nm are demonstrated.