A method for efficient and extensive H/D exchange of substituted benzene derivatives which is catalyzed by heterogeneous Pd/C in D(2)O as a deuterium source under hydrogen atmosphere is described. Multi-deuterium incorporation into unactivated linear or branched alkyl chains that bear a carboxyl, hydroxyl, ether, ester, or amide moiety and are connected with a benzene ring was achieved by using the Pd/C-H(2)-D(2)O system. The present method does not require expensive deuterium gas or any special equipment.