Precise measurement of SAW velocity using SAW delay line

T Nomura; T Yasuda; S Shiokawa; T Moriizumi

doi:10.1109/58.9319

Precise measurement of SAW velocity using SAW delay line

IEEE Trans Ultrason Ferroelectr Freq Control. 1988;35(6):646-51. doi: 10.1109/58.9319.

Authors

T Nomura¹, T Yasuda, S Shiokawa, T Moriizumi

Affiliation

¹ Dept. of Electr. Commun., Shibaura Inst. of Technol., Tokyo.

PMID: 18290199
DOI: 10.1109/58.9319

Abstract

A method of nondestructive evaluation (NDE) by measuring the acoustic properties of materials using a surface-acoustic-wave (SAW) delay line is presented. A SAW delay line with three interdigital transducers (IDTs) deposited on a piezoelectric substrate is used to measure the SAW velocity of the sample material, using a fluid couplant. The SAW velocity is obtained from the frequency dependence of the delay line, and movement in the z-direction is not required. Measurements have been made for an anisotropic material at frequencies from 35 to 55 MHz. The experimental results agree well with the theoretical results. Moreover, it has been found that the focused SAW excited from a Fresnel-phase-plate IDT is suitable for mapping the two-dimensional variation of SAW velocity on an anisotropic sample surface.