The development and characteristics of a high-speed EELS mapping system for a dedicated STEM

J Electron Microsc (Tokyo). 2008 Apr;57(2):41-5. doi: 10.1093/jmicro/dfn001.

Abstract

A new EELS (electron energy loss spectroscopy) real-time elemental mapping system has been developed for a dedicated scanning transmission electron microscope (STEM). The previous two-window-based jump-ratio system has been improved by a three-window-based system. It is shown here that the three-window imaging method has less artificial intensity in elemental maps than the two-window-based method. Using the new three-window system, the dependence of spatial resolution on the energy window width was studied experimentally and also compared with TEM-based EELS. Here it is shown experimentally that the spatial resolution of STEM-based EELS is independent of the energy window width in a range from 10 eV to 60 eV.

MeSH terms

  • Chromium / chemistry
  • Microscopy, Electron, Scanning Transmission / instrumentation
  • Microscopy, Electron, Scanning Transmission / methods*
  • Silicon Dioxide / chemistry
  • Spectroscopy, Electron Energy-Loss / instrumentation
  • Spectroscopy, Electron Energy-Loss / methods*
  • Titanium / chemistry

Substances

  • Chromium
  • Silicon Dioxide
  • Titanium