Hemispherical Au-Ag alloy nanoparticles were prepared on 2-inch Si wafer by thermal annealing Au-Ag alloy thin film in protective ambient. The nanoparticles were evenly distributed on the substrate surface. The diameter of the nanoparticles is dependent of the deposition duration of the Au-Ag alloy thin film, and also the separation between the nanoparticles. The minimum and maximum diameters of the nanoparticles obtained so far are about 5 nm and 160 nm, respectively. Experimental evidences indicated that the formation of the hemispherical nanoparticles is due to the surface tensile stressing induced by the lattice expansion.