The fabrication of periodic metal nanodot arrays through pulsed laser melting induced fragmentation of metal nanogratings

Nanotechnology. 2009 Jul 15;20(28):285310. doi: 10.1088/0957-4484/20/28/285310. Epub 2009 Jun 23.

Abstract

We propose and demonstrate a new method for fabricating periodic arrays of metal nanodots over a large area. In this method, metal nanogratings were first patterned on a substrate by nanoimprint lithography and lift-off, and were then melted using a single excimer laser pulse. We found that the laser melting broke the metal nanogratings into periodic nanodots. Furthermore, we demonstrated the control of the nanodot array pitch using a substrate surface topology, and the fabrication of two-dimensional periodic metal nanodot arrays of 70 nm diameter and 200 nm period. The fragmentation of lines into dots was attributed to the Rayleigh instability in a liquid cylinder.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Gold / chemistry
  • Metal Nanoparticles / chemistry*
  • Metal Nanoparticles / ultrastructure
  • Microscopy, Electron, Scanning
  • Nanostructures / chemistry*
  • Nanostructures / ultrastructure
  • Nanotechnology / methods*

Substances

  • Gold