In this review, the literature on the subject of electrothermal vaporization-inductively coupled plasma-mass spectrometry (ETV-ICP-MS) published during the last decade is reviewed with a double purpose: an evaluation of the possibilities of this technique for dealing with very challenging analytical applications on the one hand, and the establishment of a reference guide for method development in ETV-ICP-MS on the other. First, a brief introduction, pointing out the milestones in the development of the technique will provide the reader with a better understanding of the present situation of ETV-ICP-MS and its future perspective. After a section on the basic processes occurring in the furnace and during analyte transport, a guide for method development for challenging analytical applications is proposed, based on the existing literature. Next, the latest contributions in the main application areas of the field are reviewed, with special attention to the most challenging ones: i.e. speciation, "thermal" resolution, enabling complex matrixes to be analyzed and spectral overlap to be avoided, and the direct analysis of slurries and solid samples. Finally, the advantages obtained by coupling an ETV unit to newer types of ICP-MS instrumentation, equipped with collision/reaction cells, time-of-flight (TOF) or sector field (SF) spectrometers, are also discussed.