A nano grating tunable MEMS optical filter for high-speed on-chip multispectral fluorescent detection

Steven C Truxal; Nien-Tsu Huang; Katsuo Kurabayashi

doi:10.1109/IEMBS.2009.5333287

A nano grating tunable MEMS optical filter for high-speed on-chip multispectral fluorescent detection

Annu Int Conf IEEE Eng Med Biol Soc. 2009:2009:6693-5. doi: 10.1109/IEMBS.2009.5333287.

Authors

Steven C Truxal¹, Nien-Tsu Huang, Katsuo Kurabayashi

Affiliation

¹ Department of Mechanical Engineering, University of Michigan, MI, USA.

PMID: 19964177
DOI: 10.1109/IEMBS.2009.5333287

Abstract

We report a microelectromechanical (MEMS) tunable optical filter and its integration in a fluorescence microscope for high speed on-chip spectral measurements. This integration allows for measurements of any fluorescence sample placed onto the microscope stage. We demonstrate the system capabilities by taking spectral measurements of multicolor fluorescent beads and fluorescently labeled cells passing through a microfluidic cytometer. The system has applications in biological studies where the measurement of multiple fluorescent peaks is restricted by the detection method's speed and sensitivity.

Publication types

Research Support, Non-U.S. Gov't
Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

Cell Line, Tumor
Filtration / instrumentation*
Humans
Micro-Electrical-Mechanical Systems / instrumentation*
Microfluidic Analytical Techniques / instrumentation*
Microscopy, Fluorescence
Nanotechnology / instrumentation*
Optical Devices*
Polymers / chemistry
Silicon / chemistry
Spectrometry, Fluorescence

Substances

Polymers
Silicon