Strain sensing with submicron Al-AlO(x)-Al tunnel junctions

Rev Sci Instrum. 2010 Feb;81(2):023901. doi: 10.1063/1.3298582.

Abstract

We demonstrate a local strain sensing method for nanostructures based on metallic Al tunnel junctions with AlO(x) barriers. The junctions were fabricated on top of a thin silicon nitride membrane, which was actuated with an atomic force microscope tip attached to a stiff cantilever. A large relative change in the tunneling resistance in response to the applied strain (gauge factor) was observed up to a value of 37. This facilitates local static strain variation measurements down to approximately 10(-7). This type of strain sensor could have applications in nanoelectromechanical systems used in displacement, force, and mass sensing, for example.