Note: creep character of piezoelectric actuator under switched capacitor charge pump control

Yu Ting Ma; Liang Huang; Yong Bin Liu; Zhi Hua Feng

doi:10.1063/1.3572267

Note: creep character of piezoelectric actuator under switched capacitor charge pump control

Rev Sci Instrum. 2011 Apr;82(4):046106. doi: 10.1063/1.3572267.

Authors

Yu Ting Ma¹, Liang Huang, Yong Bin Liu, Zhi Hua Feng

Affiliation

¹ Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, Anhui, 230026, China.

PMID: 21529050
DOI: 10.1063/1.3572267

Abstract

A major deficiency in piezoelectric actuator performance is caused by hysteresis and creep effects. Switched capacitor charge pump control was previously proved to be an effective way to reduce hysteresis. In this work, creep character of a piezoelectric stack under charge pump control is investigated and modeled. Experiments show that the creep can be reduced by about 77% compared with the one under voltage control. The creep factor denoting the degree of creep shows hysteresis loops similar to displacement outputs under voltage control.