High resolution on-chip spectroscopy based on miniaturized microdonut resonators

Opt Express. 2011 Jun 20;19(13):12356-64. doi: 10.1364/OE.19.012356.

Abstract

We experimentally demonstrate a high resolution integrated spectrometer on silicon on insulator (SOI) substrate using a large-scale array of microdonut resonators. Through top-view imaging and processing, the measured spectral response of the spectrometer shows a linewidth of ~0.6 nm with an operating bandwidth of ~50 nm. This high resolution and bandwidth is achieved in a compact size using miniaturized microdonut resonators (radius ~2 μm) with a high quality factor, single-mode operation, and a large free spectral range. The microspectrometer is realized using silicon process compatible fabrication and has a great potential as a high-resolution, large dynamic range, light-weight, compact, high-speed, and versatile microspectrometer.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Equipment Design
  • Microscopy, Electron, Scanning
  • Microspectrophotometry / instrumentation*
  • Microspectrophotometry / methods*
  • Miniaturization / methods
  • Optical Devices*
  • Optics and Photonics / instrumentation*
  • Optics and Photonics / methods*
  • Silicon / chemistry

Substances

  • Silicon