Ultrahigh 22 nm resolution coherent diffractive imaging using a desktop 13 nm high harmonic source

Opt Express. 2011 Nov 7;19(23):22470-9. doi: 10.1364/OE.19.022470.

Abstract

New diffractive imaging techniques using coherent x-ray beams have made possible nanometer-scale resolution imaging by replacing the optics in a microscope with an iterative phase retrieval algorithm. However, to date very high resolution imaging (< 40 nm) was limited to large-scale synchrotron facilities. Here, we present a significant advance in image resolution and capabilities for desktop soft x-ray microscopes that will enable widespread applications in nanoscience and nanotechnology. Using 13 nm high harmonic beams, we demonstrate a record 22 nm spatial resolution for any tabletop x-ray microscope. Finally, we show that unique information about the sample can be obtained by extracting 3-D information at very high numerical apertures.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.