Si-nanowire-array-based NOT-logic circuits constructed on plastic substrates using top-down methods

J Nanosci Nanotechnol. 2013 May;13(5):3350-3. doi: 10.1166/jnn.2013.7229.

Abstract

Si-nanowire (NW)-array-based NOT-logic circuits were constructed on plastic substrates. The Si-NW arrays were fabricated on a Si wafer through top-down methods, including conventional photolithography and crystallographic wet etching, and transferred onto the plastic substrates. Two field-effect transistors were fabricated on a single Si-NW array composed of five nanowires aligned in parallel and connected in series to form NOT-logic circuits. The excellent flexibility of the fabricated device was confirmed by bending-cycling tests. The voltage-transfer curve of the NOT-logic circuits showed an inverting operation with a logic swing of -92% and voltage gain of -2.5.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Crystallization / methods
  • Equipment Design
  • Equipment Failure Analysis
  • Materials Testing
  • Nanostructures / chemistry*
  • Nanostructures / ultrastructure*
  • Nanotechnology / instrumentation*
  • Particle Size
  • Plastics / chemistry*
  • Signal Processing, Computer-Assisted / instrumentation*
  • Silicon / chemistry*
  • Transistors, Electronic*

Substances

  • Plastics
  • Silicon