Ultra-thin 3D nano-devices from atomic layer deposition on polyimide

Adv Mater. 2014 Jun 18;26(23):3962-7. doi: 10.1002/adma.201400410. Epub 2014 Apr 1.

Authors

Nathan T Eigenfeld¹, Jason M Gray, Joseph J Brown, George D Skidmore, Steven M George, Victor M Bright

Affiliation

¹ Department of Mechanical Engineering, University of Colorado at Boulder, 1111 Engineering Drive, 427 UCB, Boulder, CO, 80309-0427, USA.

PMID: 24692235
DOI: 10.1002/adma.201400410

No abstract available

Keywords: NEMS; atomic layer deposition; microbolometer; nanofabrication; polymers.

Publication types

Research Support, U.S. Gov't, Non-P.H.S.