Table-top soft x-ray microscope using laser-induced plasma from a pulsed gas jet

Opt Express. 2014 Sep 22;22(19):23489-95. doi: 10.1364/OE.22.023489.

Abstract

An extremely compact soft x-ray microscope operating in the "water window" region at the wavelength λ = 2.88 nm is presented, making use of a long-term stable and nearly debris-free laser-induced plasma from a pulsed nitrogen gas jet target. The well characterized soft x-ray radiation is focused by an ellipsoidal grazing incidence condenser mirror. Imaging of a sample onto a CCD camera is achieved with a Fresnel zone plate using magnifications up to 500x. The spatial resolution of the recorded microscopic images is about 100 nm as demonstrated for a Siemens star test pattern.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Diagnostic Imaging / instrumentation*
  • Diagnostic Techniques, Ophthalmological / instrumentation*
  • Diatoms / ultrastructure*
  • Equipment Design
  • Humans
  • Lasers*
  • Light*
  • Microscopy / methods*
  • X-Rays