An APT investigation of an amorphous Cr-B-C thin film

T Boll; M Thuvander; S Koch; J N Wagner; N Nedfors; U Jansson; K Stiller

doi:10.1016/j.ultramic.2015.01.001

An APT investigation of an amorphous Cr-B-C thin film

Ultramicroscopy. 2015 Dec:159 Pt 2:217-22. doi: 10.1016/j.ultramic.2015.01.001. Epub 2015 Jan 29.

Authors

T Boll¹, M Thuvander², S Koch¹, J N Wagner³, N Nedfors⁴, U Jansson⁴, K Stiller¹

Affiliations

¹ Department of Applied Physics, Chalmers University of Technology, SE-412 96 Göteborg, Sweden.
² Department of Applied Physics, Chalmers University of Technology, SE-412 96 Göteborg, Sweden. Electronic address: [email protected].
³ KNMF, Karslruhe Institute of Technology, DE-76344 Eggenstein-Leopoldshafen, Germany.
⁴ Department of Chemistry, The Ångström Laboratory, Uppsala University, SE-751 21 Uppsala, Sweden.

PMID: 25667171
DOI: 10.1016/j.ultramic.2015.01.001

Abstract

A magnetron sputtered amorphous Cr-B-C thin film was investigated by means of atom probe tomography (APT). The film is constituted of two phases; a Cr-rich phase present as a few nanometer large regions embedded in a Cr-poor phase (tissue phase). The Cr-rich regions form columnar chains oriented parallel to the growth direction of the film. It was found that the Cr-rich regions have a higher B:C ratio than the Cr-poor regions. The composition of the phases was determined as approximately 35Cr-33B-30C and 15Cr-40B-42C (at%), respectively. The results suggest that this type of nanocomposite films has a more complex structure than previously anticipated, which may have an importance for the mechanical and electrical properties.

Keywords: Atom probe tomography; Boride; Carbon; Cr–B–C; Metall carbo-boride; Nanocomposite; Thin film.

Publication types

Research Support, Non-U.S. Gov't