Sub-5 nm Patterning by Directed Self-Assembly of Oligo(Dimethylsiloxane) Liquid Crystal Thin Films

Koen Nickmans; Jeffrey N Murphy; Bas de Waal; Philippe Leclère; Jan Doise; Roel Gronheid; Dick J Broer; Albertus P H J Schenning

doi:10.1002/adma.201602891

Sub-5 nm Patterning by Directed Self-Assembly of Oligo(Dimethylsiloxane) Liquid Crystal Thin Films

Adv Mater. 2016 Dec;28(45):10068-10072. doi: 10.1002/adma.201602891. Epub 2016 Sep 30.

Authors

Koen Nickmans¹, Jeffrey N Murphy¹, Bas de Waal², Philippe Leclère³, Jan Doise^{4

5}, Roel Gronheid⁵, Dick J Broer^{1

6}, Albertus P H J Schenning^{1

6}

Affiliations

¹ Laboratory of Functional Organic Materials and Devices, Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands.
² Laboratory of Macromolecular Organic Chemistry, Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, 5600 MB, Eindhoven, The Netherlands.
³ Laboratory for Chemistry of Novel Materials, Center for Innovation and Research in Materials and Polymers (CIRMAP), University of Mons (UMONS), Place du Parc 20, B 7000, Mons, Belgium.
⁴ Department of Electrical Engineering, K.U. Leuven, Kasteelpark Arenberg 10, B-3001, Leuven, Belgium.
⁵ Imec vzw, Kapeldreef 75, B-3001, Leuven, Belgium.
⁶ Institute for Complex Molecular Systems, Eindhoven University of Technology, 5600 MB, Eindhoven, The Netherlands.

PMID: 27689779
DOI: 10.1002/adma.201602891

Abstract

Highly ordered nanopatterns are obtained at sub-5 nm periodicities by the graphoepitaxial directed self-assembly of monodisperse, oligo(dimethylsiloxane) liquid crystals. These hybrid organic/inorganic liquid crystals are of high interest for nanopatterning applications due to the combination of their ultrasmall feature sizes and their ability to be directed into highly ordered domains without additional annealing.

Keywords: directed self-assembly; graphoepitaxy; high-χ low-N; liquid crystals; nanolithography; nanopatterning; oligo(dimethylsiloxane).