This chapter reviews the design, fabrication, characterization, and application of piezoelectric-excited millimeter-sized cantilever (PEMC) sensors. The sensor transduction mechanism, sensing principle, and mode of operation are discussed. Bio-recognition strategies and surface functionalization methods for detection of DNA and RNA are discussed with a focus on self-assembly-based approaches. Methods for the verification of biosensor response via secondary binding assays, reversible binding assays, and the integration of complementary transduction mechanisms are presented. Sensing applications for medical diagnostics, food safety, and environmental monitoring are provided. PEMC sensor technology provides a robust platform for the real-time, label-free detection of DNA and RNA in complex matrices over nanomolar (nM) to attomolar (aM) concentration ranges.
Keywords: Bio-recognition; Biosensing; Biosensor; Cantilever; Dynamic mode; Piezoelectric; Real-time detection; Resonant frequency; Resonant frequency shift; Resonant mode.