Hole free phase plate tomography for materials sciences samples

Misa Hayashida; Kai Cui; Amin Morteza Najarian; Richard McCreery; Neerushana Jehanathan; Chris Pawlowicz; Sohei Motoki; Masahiro Kawasaki; Yuji Konyuba; Marek Malac

doi:10.1016/j.micron.2018.09.005

Hole free phase plate tomography for materials sciences samples

Micron. 2019 Jan:116:54-60. doi: 10.1016/j.micron.2018.09.005. Epub 2018 Sep 7.

Authors

Affiliations

¹ NRC-NANO, 11421 Saskatchewan Drive, Edmonton, Alberta, T6G 2M9, Canada. Electronic address: [email protected].
² NRC-NANO, 11421 Saskatchewan Drive, Edmonton, Alberta, T6G 2M9, Canada.
³ Department of Chemistry, University of Alberta, Edmonton, T6G 2G2, Canada.
⁴ NRC-NANO, 11421 Saskatchewan Drive, Edmonton, Alberta, T6G 2M9, Canada; Department of Chemistry, University of Alberta, Edmonton, T6G 2G2, Canada.
⁵ TechInsights, 1891 Robertson Rd #500, Nepean, ON K2H 5B7, Canada.
⁶ JEOL Ltd. 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan.
⁷ JEOL USA Inc. 11 Dearborn Rd, Peabody, MA 01960, USA.
⁸ NRC-NANO, 11421 Saskatchewan Drive, Edmonton, Alberta, T6G 2M9, Canada; Department of Physics, University of Alberta, Edmonton, Alberta, T6G 2E1, Canada.

PMID: 30300824
DOI: 10.1016/j.micron.2018.09.005

Abstract

We report, for the first time, the three dimensional reconstruction (3D) of a transistor from a microprocessor chip and roughness of molecular electronic junction obtained by electron tomography with Hole Free Phase Plate (HFPP) imaging. The HFPP appears to enhance contrast between inorganic materials and also increase the visibility of interfaces between different materials. We demonstrate that the degree of enhancement varies depending on material and thickness of the samples using experimental and simulation data.

Keywords: Electron tomography; Hole free phase plate (HFPP); Interface roughness; Molecular electronic junction; Transistor imaging; Transmission electron microscope (TEM).