Fabricating 3D Metastructures by Simultaneous Modulation of Flexible Resist Stencils and Basal Molds

Hongbing Cai; Qiushi Meng; Qiang Chen; Huaiyi Ding; Yanmeng Dai; Sijia Li; Disheng Chen; Qinghai Tan; Nan Pan; Changgan Zeng; Zeming Qi; Gang Liu; Yangchao Tian; Weibo Gao; Xiaoping Wang

doi:10.1002/adma.202002570

Fabricating 3D Metastructures by Simultaneous Modulation of Flexible Resist Stencils and Basal Molds

Adv Mater. 2020 Sep;32(36):e2002570. doi: 10.1002/adma.202002570. Epub 2020 Jul 26.

Authors

Hongbing Cai^{1

2

3}, Qiushi Meng^{1

3}, Qiang Chen^{1

3}, Huaiyi Ding¹, Yanmeng Dai⁴, Sijia Li¹, Disheng Chen², Qinghai Tan², Nan Pan¹, Changgan Zeng^{1

5}, Zeming Qi⁶, Gang Liu⁶, Yangchao Tian⁶, Weibo Gao², Xiaoping Wang^{1

3}

Affiliations

¹ Hefei National Laboratory for Physical Sciences at the Microscale and Synergetic Innovation Center of Quantum Information & Quantum Physics, University of Science and Technology of China, Hefei, Anhui, 230026, China.
² Division of Physics and Applied Physics, School of Physical and Mathematical Sciences, Nanyang Technological University, Singapore, 637371, Singapore.
³ USTC Center for Micro- and Nanoscale Research and Fabrication, University of Science and Technology of China, Hefei, Anhui, 230026, China.
⁴ Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Optoelectronic Engineering, Shenzhen University, Shenzhen, 518060, China.
⁵ Department of Physics, University of Science & Technology of China, Hefei, Anhui, 230027, China.
⁶ National Synchrotron Radiation Laboratory, University of Science & Technology of China, Hefei, Anhui, 230027, China.

PMID: 32715527
DOI: 10.1002/adma.202002570

Abstract

Metamaterials have gained much attention thanks to their extraordinary and intriguing optical properties beyond natural materials. However, universal high-resolution fabrications of 3D micro/nanometastructures with high-resolution remain a challenge. Here, a novel approach to fabricate sophisticated 3D micro/nanostructures with excellent robustness and precise controllability is demonstrated by simultaneously modulating of flexible resist stencils and basal molds. This method allows arbitrary manipulations of morphology, size, and orientation, as well as contact angles of the objects. Combined with a new alignment strategy of high-resolution, previously inaccessible architectures are fabricated with ultrahigh precision, leading to an excellent spectra response from the fabricated metastructures. This method provides a new possibility to realize true 3D metamaterial fabrications featuring high-resolution and direct-compatibility with broad planar lithography platforms.

Keywords: 3D fabrication; flexible resist stencils; metallic spirals; metastructures; split-ring resonators.

Abstract

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