The effect of pre-oxidation on the corrosion behavior of pure Ti covered with a solid NaCl deposit in the humid O2 flow at 600 °C is studied. The oxide scale, formed by pre-oxidation, protects the substrate from the NaCl induced corrosion during the initial stage. However, the corrosion of the pre-oxidized sample is severely accelerated by solid NaCl after an incubation period. The chlorine, generated from the decomposition of solid NaCl, diffuses into the oxide/substrate interface as ions during the incubation period, which was observed by ToF-SIMS. The chlorine at the oxide/substrate interface induces the fast corrosion after the incubation period although the pre-oxidation scale is complete and compact.