Fast determination of sample thickness through scanning moiré fringes in scanning transmission electron microscopy

Pengfei Nan; Zhiyao Liang; Yue Zhang; Yangrui Liu; Dongsheng Song; Binghui Ge

doi:10.1016/j.micron.2022.103230

Fast determination of sample thickness through scanning moiré fringes in scanning transmission electron microscopy

Micron. 2022 Apr:155:103230. doi: 10.1016/j.micron.2022.103230. Epub 2022 Feb 15.

Authors

Pengfei Nan¹, Zhiyao Liang¹, Yue Zhang¹, Yangrui Liu¹, Dongsheng Song¹, Binghui Ge²

Affiliations

¹ Information Materials and Intelligent Sensing Laboratory of Anhui Province, Key Laboratory of Structure and Functional Regulation of Hybrid Materials of Ministry of Education, Institutes of Physical Science and Information Technology, Anhui University, Hefei 230601, China.
² Information Materials and Intelligent Sensing Laboratory of Anhui Province, Key Laboratory of Structure and Functional Regulation of Hybrid Materials of Ministry of Education, Institutes of Physical Science and Information Technology, Anhui University, Hefei 230601, China. Electronic address: [email protected].

PMID: 35189548
DOI: 10.1016/j.micron.2022.103230

Abstract

Sample thickness is an important parameter in transmission electron microscopy (TEM) imaging for interpreting image contrast and understanding the relationship between properties and microstructure. In this study, we introduce a method for sample thickness determination in scanning TEM (STEM) mode based on scanning moiré fringes (SMFs). Focal-series SMF imaging is used and sample thickness can be determined in situ at a medium magnification range, with beam damage and contamination avoided to a large extent. It provides a fast and convenient approach for determining sample thickness in TEM imaging, which is particularly useful for beam-sensitive materials.

Keywords: Beam-sensitive materials; Scanning moiré fringes; Scanning transmission electron microscopy; Thickness determination.