Fabrication of a micro gas chromatography column via the layer-by-layer deposition of mesoporous silica as the stationary phase

Haiyan Zhang; Fei Feng; Yangyang Zhao; Bin Zhao; Lei Li; Dan Zheng; Xinxin Li

doi:10.1016/j.chroma.2022.463082

Fabrication of a micro gas chromatography column via the layer-by-layer deposition of mesoporous silica as the stationary phase

J Chromatogr A. 2022 Jun 21:1673:463082. doi: 10.1016/j.chroma.2022.463082. Epub 2022 Apr 21.

Authors

Haiyan Zhang¹, Fei Feng², Yangyang Zhao³, Bin Zhao³, Lei Li³, Dan Zheng⁴, Xinxin Li³

Affiliations

¹ State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China; Shanghai Institute of Technology, Shanghai 201418, China.
² State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China; Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China. Electronic address: [email protected].
³ State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
⁴ Shanghai Institute of Technology, Shanghai 201418, China.

PMID: 35490466
DOI: 10.1016/j.chroma.2022.463082

Abstract

In this paper, a micro gas chromatographic column (μGCC) was fabricated via the layer-by-layer (LBL) deposition of mesoporous silica (MS) as the stationary phase. The μGCC with embedded elliptical-cylindrical posts was fabricated by typical micro-electro-mechanical system (MEMS) techniques. The MS powder was prepared by a sol-gel method and then deposited inside the microchannels of the μGCC by LBL deposition. This process avoided the high temperature required for the sol-gel method to directly prepare MS inside the microchannel surfaces of the μGCC. Mixtures of light alkanes (C1-C4) could be separated in the μGCC. The separation results showed that the resolution between the components of the sample increased with the number of deposition cycles. When the number of deposition cycles increased from 1 to 8, the resolution of methane and ethane was increased from unseparated to 5.89.

Keywords: Layer-by-layer deposition; Mesoporous silica; Micro-electro-mechanical system.

MeSH terms

Alkanes / analysis
Chromatography, Gas / methods
Gases
Micro-Electrical-Mechanical Systems*
Silicon Dioxide* / chemistry

Substances

Alkanes
Gases
Silicon Dioxide