Nucleation Selectivity and Lateral Coalescence of GaAs over Graphene on Ge(111)

ACS Appl Mater Interfaces. 2023 Dec 27;15(51):59905-59911. doi: 10.1021/acsami.3c13600. Epub 2023 Dec 12.

Abstract

We use epitaxial lateral overgrowth (ELO) to produce semimetallic graphene nanostructures embedded in a semiconducting GaAs matrix for potential applications in plasmonics, THz generation and detection, and tunnel junctions in multijunction solar cells. We show that (1) the combination of low sticking coefficient and fast surface diffusion on graphene enhances nucleation selectivity at exposed regions of the substrate and (2) high growth temperatures favor efficient lateral overgrowth, coalescence, and planarization of epitaxial GaAs films over the graphene nanostructures. Our work provides a more complete understanding of ELO using graphene masks, as opposed to more conventional dielectric masks, and enables new types of metal/semiconductor nanocomposites.

Keywords: III-Vs; epitaxial lateral overgrowth; graphene; molecular beam epitaxy; nanocomposites.