Aerosol Assisted Chemical Vapour Deposition (AACVD) of Zinc dichalcogenoimidodiphosphinate Complexes for the Deposition of Zinc Selenide Thin Films

Dichalcogenoimidodiphosphinate complexes of zinc [Zn{(EPⁱPr₂)₂N}₂], [E=Se,Se; S,Se] were synthesized through metathetical reactions from the dichalcogenoimidodiphosphinate ligands [(EE'PⁱPr₂NH)] (E, E'=Se, Se; S, Se). These complexes were characterized and used as single-source precursors through Aerosol-Assisted Chemical Vapour Deposition (AACVD) for the deposition of cubic zinc selenide (ZnSe) films on glass substrates. The deposition temperature occurred at 500 and 525 °C, while the flow rates of the carrier gas was 160 and 240 standard cubic centimetre (sccm). The morphology of the deposited films ranged between dense fibrous network and woven fibres. X-ray photoelectron spectroscopy (XPS) confirmed the presence of the constituent elements in zinc selenide.