An all-fiber vibration sensor based on the Fabry-Perot interferometer (FPI) is proposed and experimentally evaluated in this study. The sensor is fabricated by introducing a Fabry-Perot cavity to the single-mode fiber using femtosecond laser ablation. The cavity and the tail act together as a cantilever beam, which can be used as a vibration receiver. When mechanical vibrations are applied, the cavity length of the Fabry-Perot interferometer changes accordingly, altering the interference fringes. Due to the low moment of inertia of the fiber optic cantilever beam, the sensor can achieve broadband frequency responses and high vibration sensitivity without an external vibration receiver structure. The frequency range of sensor detection is 70 Hz-110 kHz, and the sensitivity of the sensor is 60 mV/V. The sensor's signal-to-noise ratio (SNR) can reach 56 dB. The influence of the sensor parameters (cavity depth and fiber tail length) on the sensing performance are also investigated in this study. The sensor has the advantages of compact structure, high sensitivity, and wideband frequency response, which could be a promising candidate for vibration sensing.
Keywords: Fabry-Perot interferometer; femtosecond laser micromachining; fiber vibration sensor.