Dynamic tuning of terahertz atomic lattice vibration via cross-scale mode coupling to nanomechanical resonance in WSe2 membranes

Bo Xu; Zejuan Zhang; Jiaze Qin; Jiaqi Wu; Luming Wang; Jiankai Zhu; Chenyin Jiao; Wanli Zhang; Juan Xia; Zenghui Wang

doi:10.1038/s41378-024-00827-w

Dynamic tuning of terahertz atomic lattice vibration via cross-scale mode coupling to nanomechanical resonance in WSe₂ membranes

Microsyst Nanoeng. 2025 Jan 22;11(1):18. doi: 10.1038/s41378-024-00827-w.

Authors

Bo Xu^#^{1

2

3}, Zejuan Zhang^#^{4

5}, Jiaze Qin⁴, Jiaqi Wu⁴, Luming Wang⁴, Jiankai Zhu⁴, Chenyin Jiao⁴, Wanli Zhang^{5

6}, Juan Xia⁷, Zenghui Wang^{8

9}

Affiliations

¹ Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu, 610054, China. [email protected].
² Hubei Key Laboratory of Micro-Nanoelectronic Materials and Devices, Hubei University, Wuhan, 430062, China. [email protected].
³ State Key Laboratory of Precision Measuring Technology and Instruments (Tianjin University), Tianjin, 300350, China. [email protected].
⁴ Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu, 610054, China.
⁵ School of Integrated Sciences and Engineering (Exemplary School of Microelectronics), University of Electronic Science and Technology of China, Chengdu, 610054, China.
⁶ State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, China.
⁷ Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu, 610054, China. [email protected].
⁸ Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu, 610054, China. [email protected].
⁹ State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, China. [email protected].

^# Contributed equally.

PMID: 39843422
DOI: 10.1038/s41378-024-00827-w

Abstract

Nanoelectromechanical systems (NEMS) based on atomically-thin tungsten diselenide (WSe₂), benefiting from the excellent material properties and the mechanical degree of freedom, offer an ideal platform for studying and exploiting dynamic strain engineering and cross-scale vibration coupling in two-dimensional (2D) crystals. However, such opportunity has remained largely unexplored for WSe₂ NEMS, impeding exploration of exquisite physical processes and realization of novel device functions. Here, we demonstrate dynamic coupling between atomic lattice vibration and nanomechanical resonances in few-layer WSe₂ NEMS. Using a custom-built setup capable of simultaneously detecting Raman and motional signals, we accomplish cross-scale mode coupling between the THz crystal phonon and MHz structural vibration, achieving GHz frequency tuning in the atomic lattice modes with a dynamic gauge factor of 61.9, the best among all 2D crystals reported to date. Our findings show that such 2D NEMS offer great promises for exploring cross-scale physics in atomically-thin semiconductors.