Piezoelectric micromachined ultrasonic transducers (PMUTs) show considerable promise for application in ultrasound imaging, but the limited bandwidth of the traditional PMUTs largely affects the imaging quality. This paper focuses on how to arrange cells with different frequencies to maximize the bandwidth and proposes a multi-frequency PMUT (MF-PMUT) linear array. Seven cells with gradually changing frequencies are arranged in a monotonic trend to form a unit, and 32 units are distributed across four lines, forming one element. To investigate how the arrangement of cells affects the bandwidth, three different arrays were designed according to the extent of unit aggregation from the same frequency. Underwater experiments were conducted to assess the acoustic performance, especially the bandwidth. We found that the densest arrangement of the same cells produced the largest bandwidth, achieving a 92% transmission bandwidth and a 50% burst-echo bandwidth at 6 MHz. The mechanism was investigated from the coupling point of view by finite element analysis and laser Doppler vibrometry, focusing on the cell displacements. The results demonstrated strong ultrasound coupling in the devices, resulting in larger bandwidths. To exploit the advanced bandwidth but reduce the crosstalk, grooves for isolation were fabricated between elements. This work proposes an effective strategy for developing advanced PMUT arrays that would benefit ultrasound imaging applications.
Keywords: PMUT; bandwidth; coupling; multiple frequency; ultrasound imaging.