The interaction of a short pulse XeCl excimer laser radiation with human dentin was investigated. The dependence of surface temperatures and temperature gradients into the treated teeth on laser parameters such as fluence (0.5J/cm2-7J/cm2), pulse repetition rate (1Hz-35Hz), and spot size (0.004cm2-0.12cm2) was studied. Additionally, the effect of fluence and pulse repetition rate on dentin microstructure was studied using scanning electron microscopy (SEM). It is demonstrated that this "cold ablation" excimer laser can result in significant thermal modification in the dentin surfaces. Changes include the formation of melted dentin grains, which uniformly cover the surface and the exposed dentin tubules. Maximum temperatures of the ablated surfaces, however, remained relatively low at most laser parameters used. Also, the immediate neighborhood of the root canal was essentially undisturbed at most laser parameters. These observations suggest that with the appropriate choice of parameters XeCl lasers can be effective in producing surface structures that may prove useful in enhancing bond strength or other applications in dentistry, without exposing tooth pulp to significant temperature elevation.