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Numerical investigation of particle formation mechanisms in silane discharges.
De Bleecker K, Bogaerts A, Gijbels R, Goedheer W. De Bleecker K, et al. Among authors: bogaerts a. Phys Rev E Stat Nonlin Soft Matter Phys. 2004 May;69(5 Pt 2):056409. doi: 10.1103/PhysRevE.69.056409. Epub 2004 May 26. Phys Rev E Stat Nonlin Soft Matter Phys. 2004. PMID: 15244953
Modeling of the formation and transport of nanoparticles in silane plasmas.
De Bleecker K, Bogaerts A, Goedheer W. De Bleecker K, et al. Among authors: bogaerts a. Phys Rev E Stat Nonlin Soft Matter Phys. 2004 Nov;70(5 Pt 2):056407. doi: 10.1103/PhysRevE.70.056407. Epub 2004 Nov 18. Phys Rev E Stat Nonlin Soft Matter Phys. 2004. PMID: 15600765
311 results