Sub-nanometer scale depth patterning on sapphire crystal by femtosecond soft x-ray laser pulse irradiation.
Mikami K, Ishino M, Motoyama H, Dinh TH, Yokomae S, Yamaguchi G, Egawa S, Sakaue K, Mimura H, Higashiguchi T, Kubota Y, Owada S, Iwasaki A, Inubushi Y, Nishikino M.
Mikami K, et al. Among authors: sakaue k.
Opt Lett. 2023 Oct 1;48(19):5041-5044. doi: 10.1364/OL.501589.
Opt Lett. 2023.
PMID: 37773380