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Morphological and Compositional Studies on Al/Ti/TiN/Si, Al/TiN/Si, Al/W/Si, Al/WN/Si Systems to Test the Diffusion Barrier Properties of Nanoscale-Thick Layers between Al and Si.
Censabella M, Drago C, Cafra B, Badalà P, Bassi A, Piccitto G, Mirabella S, Grimaldi MG, Ruffino F. Censabella M, et al. Among authors: cafra b. Micromachines (Basel). 2021 Jul 21;12(8):849. doi: 10.3390/mi12080849. Micromachines (Basel). 2021. PMID: 34442471 Free PMC article.