Wafer-scale nanofabrication of telecom single-photon emitters in silicon.
Hollenbach M, Klingner N, Jagtap NS, Bischoff L, Fowley C, Kentsch U, Hlawacek G, Erbe A, Abrosimov NV, Helm M, Berencén Y, Astakhov GV.
Hollenbach M, et al. Among authors: erbe a.
Nat Commun. 2022 Dec 12;13(1):7683. doi: 10.1038/s41467-022-35051-5.
Nat Commun. 2022.
PMID: 36509736
Free PMC article.