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Sub-10 nm nanoimprint lithography by wafer bowing.
Wu W, Tong WM, Bartman J, Chen Y, Walmsley R, Yu Z, Xia Q, Park I, Picciotto C, Gao J, Wang SY, Morecroft D, Yang J, Berggren KK, Williams RS. Wu W, et al. Among authors: xia q. Nano Lett. 2008 Nov;8(11):3865-9. doi: 10.1021/nl802295n. Epub 2008 Oct 7. Nano Lett. 2008. PMID: 18837563
Hybrid nanoimprint-soft lithography with sub-15 nm resolution.
Li Z, Gu Y, Wang L, Ge H, Wu W, Xia Q, Yuan C, Chen Y, Cui B, Williams RS. Li Z, et al. Among authors: xia q. Nano Lett. 2009 Jun;9(6):2306-10. doi: 10.1021/nl9004892. Nano Lett. 2009. PMID: 19422192 Free article.
4,908 results