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Fabrication of Amorphous Silicon-Carbon Hybrid Films Using Single-Source Precursors.
Sauermoser A, Lainer T, Knoechl A, Goni F, Fischer RC, Fitzek H, Dienstleder M, Prietl C, Kelterer AM, Bandl C, Jakopic G, Kothleitner G, Haas M. Sauermoser A, et al. Among authors: jakopic g. Inorg Chem. 2023 Sep 25;62(38):15490-15501. doi: 10.1021/acs.inorgchem.3c01846. Epub 2023 Sep 12. Inorg Chem. 2023. PMID: 37700615 Free PMC article.