Area-selective atomic layer deposition on 2D monolayer lateral superlattices.
Park J, Kwak SJ, Kang S, Oh S, Shin B, Noh G, Kim TS, Kim C, Park H, Oh SH, Kang W, Hur N, Chai HJ, Kang M, Kwon S, Lee J, Lee Y, Moon E, Shi C, Lou J, Lee WB, Kwak JY, Yang H, Chung TM, Eom T, Suh J, Han Y, Jeong HY, Kim Y, Kang K.
Park J, et al. Among authors: kwak sj.
Nat Commun. 2024 Mar 8;15(1):2138. doi: 10.1038/s41467-024-46293-w.
Nat Commun. 2024.
PMID: 38459015
Free PMC article.