Determination of optical constants of thin films in the EUV.
Ciesielski R, Saadeh Q, Philipsen V, Opsomer K, Soulié JP, Wu M, Naujok P, van de Kruijs RWE, Detavernier C, Kolbe M, Scholze F, Soltwisch V.
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Appl Opt. 2022 Mar 10;61(8):2060-2078. doi: 10.1364/AO.447152.
Appl Opt. 2022.
PMID: 35297898