Soft X-ray absorption and fragmentation of tin-oxo cage photoresists.
Haitjema J, Castellanos S, Lugier O, Bespalov I, Lindblad R, Timm M, Bülow C, Zamudio-Bayer V, Lau JT, von Issendorff B, Hoekstra R, Witte K, Watts B, Schlathölter T, Brouwer AM.
Haitjema J, et al. Among authors: schlatholter t.
Phys Chem Chem Phys. 2024 Feb 14;26(7):5986-5998. doi: 10.1039/d3cp05428d.
Phys Chem Chem Phys. 2024.
PMID: 38293812