All-Water Etching-Free Electron Beam Lithography for On-Chip Nanomaterials.
Wang X, Dai X, Wang H, Wang J, Chen Q, Chen F, Yi Q, Tang R, Gao L, Ma L, Wang C, Wang X, He G, Fei Y, Guan Y, Zhang B, Dai Y, Tu X, Zhang L, Zhang L, Zou G.
Wang X, et al. Among authors: zhang l, zhang b.
ACS Nano. 2023 Mar 14;17(5):4933-4941. doi: 10.1021/acsnano.2c12387. Epub 2023 Feb 20.
ACS Nano. 2023.
PMID: 36802505