Advanced CMOS manufacturing of superconducting qubits on 300 mm wafers.
Van Damme J, Massar S, Acharya R, Ivanov T, Perez Lozano D, Canvel Y, Demarets M, Vangoidsenhoven D, Hermans Y, Lai JG, Vadiraj AM, Mongillo M, Wan D, De Boeck J, Potočnik A, De Greve K.
Van Damme J, et al. Among authors: de boeck j.
Nature. 2024 Oct;634(8032):74-79. doi: 10.1038/s41586-024-07941-9. Epub 2024 Sep 18.
Nature. 2024.
PMID: 39294381
Free PMC article.