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Enhanced wet etching of patterned GaN with ion implantation.
Gao Y, Lan C, Xue J, Yan S, Wang Y, Xu F, Shen B, Chu PK. Gao Y, et al. Among authors: yan s. J Nanosci Nanotechnol. 2011 Dec;11(12):10949-53. doi: 10.1166/jnn.2011.4055. J Nanosci Nanotechnol. 2011. PMID: 22409032
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