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CMOS Scaling for the 5 nm Node and Beyond: Device, Process and Technology.
Radamson HH, Miao Y, Zhou Z, Wu Z, Kong Z, Gao J, Yang H, Ren Y, Zhang Y, Shi J, Xiang J, Cui H, Lu B, Li J, Liu J, Lin H, Xu H, Li M, Cao J, He C, Duan X, Zhao X, Su J, Du Y, Yu J, Wu Y, Jiang M, Liang D, Li B, Dong Y, Wang G. Radamson HH, et al. Among authors: jiang m. Nanomaterials (Basel). 2024 May 9;14(10):837. doi: 10.3390/nano14100837. Nanomaterials (Basel). 2024. PMID: 38786792 Free PMC article. Review.
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