New silicon-based micro-electro-mechanical systems for photo-acoustic trace-gas detection.
Pelini J, Dello Russo S, Lopez Garcia I, Concetta Canino M, Roncaglia A, Cancio Pastor P, Galli I, Ren W, De Natale P, Wang Z, Borri S, Siciliani de Cumis M.
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Photoacoustics. 2024 May 21;38:100619. doi: 10.1016/j.pacs.2024.100619. eCollection 2024 Aug.
Photoacoustics. 2024.
PMID: 39669097
Free PMC article.