Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry.
Tanksalvala M, Porter CL, Esashi Y, Wang B, Jenkins NW, Zhang Z, Miley GP, Knobloch JL, McBennett B, Horiguchi N, Yazdi S, Zhou J, Jacobs MN, Bevis CS, Karl RM Jr, Johnsen P, Ren D, Waller L, Adams DE, Cousin SL, Liao CT, Miao J, Gerrity M, Kapteyn HC, Murnane MM.
Tanksalvala M, et al. Among authors: yazdi s.
Sci Adv. 2021 Jan 27;7(5):eabd9667. doi: 10.1126/sciadv.abd9667. Print 2021 Jan.
Sci Adv. 2021.
PMID: 33571123
Free PMC article.