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Area-selective atomic layer deposition on 2D monolayer lateral superlattices.
Park J, Kwak SJ, Kang S, Oh S, Shin B, Noh G, Kim TS, Kim C, Park H, Oh SH, Kang W, Hur N, Chai HJ, Kang M, Kwon S, Lee J, Lee Y, Moon E, Shi C, Lou J, Lee WB, Kwak JY, Yang H, Chung TM, Eom T, Suh J, Han Y, Jeong HY, Kim Y, Kang K. Park J, et al. Nat Commun. 2024 Mar 8;15(1):2138. doi: 10.1038/s41467-024-46293-w. Nat Commun. 2024. PMID: 38459015 Free PMC article.