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Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy.
Nanomaterials (Basel). 2021 Apr 10;11(4):978. doi: 10.3390/nano11040978.
Nanomaterials (Basel). 2021.
PMID: 33920231
Free PMC article.
Crystallinity Effect on Electrical Properties of PEALD-HfO2 Thin Films Prepared by Different Substrate Temperatures.
Zhang XY, Han J, Peng DC, Ruan YJ, Wu WY, Wuu DS, Huang CJ, Lien SY, Zhu WZ.
Zhang XY, et al.
Nanomaterials (Basel). 2022 Nov 3;12(21):3890. doi: 10.3390/nano12213890.
Nanomaterials (Basel). 2022.
PMID: 36364666
Free PMC article.
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